Link http://www.venturedeal.com/Search/SearchResultTransactionDetail.aspx?TransactionId=66e4e0b9-9bbe-41e9-abda-9cfd1d1e764f&Preview=1
Date 11/23/2009
Company Name NEXX Systems
Mailing Address 900 Middlesex Turnpike Bldg. 6 Billerica, MA 01821
Company Description NEXX Systems was founded in August 2001 through the acquisition from MKS Instruments of the ASTeX systems group. The sale comprised the purchase of the Nimbus product line of sputter deposition systems and exclusive license to manufacture ECR microwave-driven plasma systems, originally sold as PlasmaQuest and now known as Cirrus.